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SEMI MF1617-98 (Reapproved 2002) (first SEMI publication)
본 가이드가 적용되는 온실가스(GHG)는 CF4
This standardization reduces the cost of software development for both equipment suppliers and device manufacturers
it is not recommended that they be used between supplier and customer unless correlation studies are completed satisfactorily
performance
M02900 - SEMI M29 - 300 mmシッピングボックスの仕様 StdPbc-0521 SEMI MF1617-98 (Reapproved 2002) (firstGlobal Silicon Wafer CommitteeJapanese Silicon Wafer Committee200388Japanese Regional Standards Committee20039www. semi. org2003111996 IC300 mm Referenced SEMI Standards SEMI E1. 9 Provisional Mechanical Specification for Cassettes Used to Transport and Store 300 mm Wafers SEMI E57 Provisional Mechanical Specification for Kinematic Couplings Used to Align and Support 300 mm Wafer Carriers